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Metal gas filter Product List

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Hastelloy all-metal gas filter

Hastelloy all-metal gas filter

Using Hastelloy for all materials.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It efficiently removes particles larger than 0.003 μm even under high flow rates and high differential pressures. We offer a wide range of products from low flow rates of about 10 L/min to medium flow rates of about 250 L/min. Compared to conventional metal filters, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters
  • Metal gas filter

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Low pressure loss metal gas filter

Low pressure loss metal gas filter

Significantly improve yield.

This is a gas filter manufactured by Purelon Japan Co., Ltd. All filter components are made of SUS316L, ensuring high corrosion resistance and excellent heat resistance without the risk of secondary generation of substances. When nitrogen gas (N2) is flowed at an inlet pressure of 0.2 MPa, the outlet pressure loss is △0.05 MPa, achieving a flow rate of 90 SLM. Additionally, under steady flow and pulsation conditions, a filtration precision of 0.003 μm has been confirmed using CNC, significantly improving yield in submicron ULSI manufacturing.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters
  • Metal gas filter

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Coarse filter all-metal gas filter

Coarse filter all-metal gas filter

Supports a wide range of filtration precision.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It supports a wide range of filtration precision from 0.1 to 10 μm under steady flow and pulsation conditions. Corrosive materials are not used in the filter components, so there is no risk of corrosion or secondary byproducts. By using a dedicated baking heater in conjunction, we achieved a degassing (moisture content) of 1.2 ppb in APIMS measurements. With continued use, levels down to 0.1 ppb are possible.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters
  • Metal gas filter

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High filtration precision all-metal gas filter

High filtration precision all-metal gas filter

Compact size for handling higher gas flow.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It uses SUS316L for all materials. It efficiently removes particles larger than 0.003μm even under high flow rates and high differential pressures. Compared to conventional products, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size. We offer a wide range of options from low flow rates of about 10L/min to medium flow rates of about 250L/min.

  • Semiconductor inspection/test equipment
  • CVD Equipment
  • Gas Filters
  • Metal gas filter

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UHP Metal Gas Filter <VCR Connection>

UHP Metal Gas Filter <VCR Connection>

High quality at low prices! We meet diverse needs with fittings, valves, pressure sensors, and more.

We handle the "UHP Metal Gas Filter" with VCR connection manufactured by DK-LOK. The material SUS316L is made from Japanese materials, ensuring high quality at a low price. For anything related to LOK fittings, face seal fittings, locking devices, lock clamps, pressure sensors, pressure gauges, digital differential pressure gauges, differential pressure sensors, and level gauges, please feel free to consult us. 【Our Features】 ■ High-quality products with excellent cost performance ■ Specialists in LOK fittings, pressure sensors, and pressure gauges ■ A wide range of product lineup *For more details, please download the PDF (English version) or feel free to contact us.

  • filter
  • Metal gas filter

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